Anaerobic Clean Oven (SCO Series) – SAMS ADVANCED CLIMATIC TECHNOLOGIES PVT LTD
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Anaerobic Clean Oven (SCO Series)

This chamber enables dehydrogenation annealing in low-temperature polysilicon TFT fabrication, activation annealing after ion doping, high oxygen annealing in oxide semiconductor TFT fabrication, polyimide film formation for flexible display devices, semiconductor passivation film curing, and other low and high oxygen

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