Piezo-resistive Accelerometer

A Piezo-resistive Accelerometer has a stable structure composed on a silicon chip created by the micromachining and semiconductor production technology. A mass and a beam on which a set of the Piezo-resisters are created on the silicon chip. A set of electrical bridged is formed by such Piezo-resistive resisters to generate signals proportional to the applied acceleration.
  • Measurements are possible over the wide frequency range covering down from the ultra low up to the high frequency as of several kHz.
  • Compact size, light weight
  • High sensitivity
  • High acceleration-resistant

Specifications

  Interior Dimensions
(W x D x H)
Interior Volume Temperature Range Humidity Control Change Rate(heat/cool) Notes
             

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