Class 100 Clean Ovens

These models are used extensively in heat treatment/drying or burn-in of semiconductor wafers, liquid crystals, disks and other components and devices requiring clean air conditions. These units can also be prepared for installation in clean-room environments. Class 100 cleanliness is achieved by employing a HEPA filter and a back-to-front laminar circulation system. The high-performance models (with MS suffix) provides stable performance even during heat-up or cooling.

Specifications

  Interior Dimensions
(W x D x H)
Interior Volume Temperature Range Humidity Control Change Rate(heat/cool) Notes
PVH-212 23.6" x 23.6" x 23.6" 7.6 cu. ft. 45 to 300°C     Vertical -type
PVC-212 23.6" x 23.6" x 23.6" 7.6 cu. ft. 85 to 200°C     Class 100 Clean Interior
PVC-232 23.6" x 23.6" x 47.2" 15.3 cu. ft. 85 to 200°C     Class 100 Clean Interior
PVC-332 31.5" x 31.5" x 47.2" 27.1 cu. ft. 85 to 200°C     Class 100 Clean Interior
 
PVHC-212 23.6" x 23.6" x 23.6" 7.6 cu. ft. 85 to 350°C     Class 100 Clean Interior

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